1. SC-8000 System Outline

　
　
　
This article talks about SC-8000, Nano Contaminants Collector, made by NAS Giken, Inc.

SC-8000 can collect metal contaminants from the hydrophobic surfaces and bevels of silicon wafers.

SC-8000 can also collect contaminants from the hydrophilic surfaces of silicon wafers, sapphire wafers, SiC wafers, solar wafers, potomasks, and LCDs.

Using pure water as the liquid for collection, SC-8000 can collect ions.  If organic solvent is used, SC-8000 can collect organic matters.

1) SC-8000 Functions

Using ordinary Windows PC, SC-8000 can sample contaminants at any given location with a variety of modes.

Required utilities are as following.:

a. Electric Power               100 through 240VAC 5A

b. N2                                 Max 20L/min.
                                        Applicable to hydrophilic sampling only

c. DA                               20L/min.
                                       Used for air sealing, during sampling only

2) SC-8000 Advantages

(1) SC-8000 can collect contaminants from the hydrophilic surfaces as well as hydrophobic surfaces.

(2) SC-8000 can collect contaminants from the bevels of wafers. (Hydrophobic only)

(3) SC-8000 can be easily operated, and does not require highly complicated skill to achieve the best performance of contaminants collection.

(4) SC-8000 is designed very compact, though it can handle 100mm through 300mm wafers.  It can also handle square shaped devices, such as wafers, photomasks, and LCD's, of which line length is up to 200mm.  SC-8000's external dimensions are 480mm width, 495mm depth, and 500mm height.