2. SC-8000 System Performance

Liquid for collection is required from 100uL through 2000uL for surface sampling, and around 170uL for bevel sampling.

Sampling speed can be set up between 0.1mm/sec. and 50mm/sec.  The best sampling speed shall be configured, after confirming the desirable collection rate on the real wafer.



Capability of Metal Collection


See attached table and chart showing SC-8000's blank value of metal contaminants.

- Samplings are made three times for the whole surface of cleaned 300mm wafer.

- Sampling speed is 30mm/sec., sampling pitch is 4mm, liquid volume is 100uL, and the sampling liquid is the mixture of HF+H2O2.

- Sampling is made with 10 metallic components of Na, Mg, Al, K, Ca, Cr, Fe, Ni, Cu, and Zn.

- Analytical data taken by each of three times are well below 5E8atoms/cm2.


1. Test method

Liquid containing 2ng of metal contaminants was applied on the clean surface of wafer and dried up, then the residual metals were collected by SC-8000 in full surface using dilute acids three (3) times.
　　　　

2. Test Process

(1) Device:
      300mm Silicon Wafer

(2) Sampling Area:
      Whole surface except 3mm width of outer edge of wafer

(3) Artificial Contamination:
      Commercially available liquid with metallic elements is dropped all over the cleaned wafer, and dried up.

(4) Sampling Liquid:
      Acidic liquid

(5) Procedure:
      Samplings are made over the sampling area on wafer three times, and put for ICP-MS for chemical analysis each time.

(6) Detected Elements:
      Li, Be, Na, Mg, Al, K, V, Mn, Fe, Co, Ni, Cu, Zn, Ga, Sr, Y, Ag, Cd, Ba, Pb, Bi, and Ce

3. SC-8000 Sampling Conditions

(1) Liquid Volume ---------- 500uL
(2) Sampling Speed --------- 3mm/sec
(3) Moving Pitch ------------ 8mm
(4) Sealing Gas Volume ----- 15L/min

Capability of Ion Collection

SC-8000 has the blank value and collection capability on ionic components as following.

1. Test Process

(1) Device:
      300mm wafer (with natural oxide)

(2) Sampling Area:
      Whole surface except 3mm width of outer edge of wafer

(3) Detected Elements:
      F-, Cl-, NO3-, SO42-, Na+, K+, and NH4+

(4) Analysis:
      Each sampling liquid is put into Ion Chromatography for chemical analysis.

2. SC-8000 Sampling Conditions

(1) Liquid Volume (Pure Water) --- 2mL
      Residual volume after sampling - 1.7 through 1.8mL
(2) Sampling Speed ---------------- 5mm/sec
(3) Moving Pitch ------------------- 8mm
      Sampling Time ---------------- 30 min
(4) Sealing Gas Vilume ------------ 15L/min
(5) Sampling Count ---------------- 1 time