1. Preparation
a. Choose a recipe from the PC screen.
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The red zone is the area sampling is to be done. When finished, the color turns to be green.
b. Set up a liquid holder on to the sampling arm.
c. Place centering pins to fit for the appropriate wafer size.
d. Make sure that the wafer surface is hydrophobic after VPD (Vapor Phase Decomposition).
e. Get the sampling liquid ready.
2. Place the wafer on turntable
Raise lifter and place the wafer correctly inside the three (3) centering pins.
Then pull down the lifter.
3. Sampling through PC screen
Click "SAMPLING" to enter the screen for sampling.
After making sure that the liquid holder and the wafer are properly set up, click "START" to begin sampling.
4. Sampling Operation
Confirming the "NEXT" lamp is on, which indicates that the sampling arm is completely moved over the wafer and descends to the expected level, inject the sampling liquid slowly into the holder with a micropipette.
Push the "NEXT" button after injecting the sampling liquid. Sampling will then start.
"NEXT" lamp flikkers when the sampling completes.
Do not move the sampling arm, and retrieve the sampling liquid out of the holder with a micropipette.
After retrieval of the sampling liquid, push "NEXT" button to move the sampling arm to the starting position.
When sampling liquid is still left on the wafer, you may retrieve the liquid directly out of the surface of wafer.
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While many whose work does not take place in a laboratory environment may be familiar with pipetting only through the single channel variety of the instrument, perhaps during a cursory course on chemistry, those who have made lab work their career use a much wider variety of pipetting instruments.
Micropippette