3. SC-8000 Operation on PC Screen

　


1. Creating Recipe for Standard Sampling


Determine sampling location by fixing starting and ending radius, etc.


Choose sampling speed, N2 gas flow, and others.

　




2. Creating Recipe for Bevel Sampling 


Determine sampling radius, sampling speed, and others.


　

3. Creating Recipe for Square Sampling


Determine sampling location by fixing starting and ending radius, etc.


Choose sampling speed, N2 gas flow, and others.



　 　

What are different between the recipes of Hydrophobic and Hydrophilic surfaces?

((Hydrophobic))

1) N2 flow rate shall be 0 (zero) L/min.

2) Input liquid supply level

((Hydrophilic))

1) Input N2 flaw rate.

2) Input wafer thickness.