6. Sampling on Bevel of Wafer (Example)

　


1. Preparation


a. Choose a recipe from the PC screen.


b. Set up the liquid holder on to the sampling arm.


　　　　　



c. Make sure that the whole wafer is hydrophobic after VPD (Vapor Phase Deposition).


d. Get the sampling liquid ready.



2. Place wafer on turntable


Raise lifter and place the wafer correctly inside three (3) centering pins.


Then pull down the lifter.





3. Sampling through PC screen


Click "SAMPLING" to enter the screen for sampling.


After making sure that the liquid holder and the wafer are properly set up, click "START" to begin sampling.



4. Sampling Operation

　　　　　
　　　　　　
　　　　　　　
　
　
(1) Sampling arm moves to the starting position of sampling.

(2) Sampling arm sinks down.

(3) Supply liquid into the holder (200uL).

(4) Push "NEXT" button.